Layer termination from ellipsometric information is entirely integrated into Aeres®. Many different multi-wavelength and spectroscopic ellipsometry options are available While using the ion beam sputter deposition technique.
In-situ optical checking and Command is offered by way of Angstrom’s optical monitoring & Command deal.
Goal rotation and carousel indexing Each and every have torque sense, preventing any procedure problems because of slips or jams in rotation.
The dimensions, position, and gear ratio of every World are optimized to deliver the best possible probable movie thickness uniformity.
Our Reticle® ion beam sputter deposition techniques are intended and engineered to create precise optical films of the highest purity, density, and security.
Variable angle stages permit for quite impressive slim film methods. On the other hand, one of its largest issues is reproducibility. The substrate is often set at an exceedingly oblique angle in relation into the resource, along with the films are incredibly sensitive to the precision of the angle.
Angstrom went to wonderful lengths to refine the tolerances of the lean angle, improving it from a variation of up to a full degree on non-Angstrom systems I’ve used to fewer than 0.
Our exclusive style permits immediate or oblique checking of the variable angle stage, removing the necessity for tooling elements or a witness glass changer. Find out more with regards to the Optical Monitoring & Control package deal right here.
In addition to sample rotation, the variable angle phase that is definitely used for Reticle® provides for in-developed angular movement from the deposition flux.
All typical Reticle® platforms incorporate an extra gridless stop-Hall ion supply with hollow cathode neutralizer.
The deposition ion Medical-grade metals supplier resource is directed towards a material focus on that has been optimized in both size and posture for that essential deposition geometry.
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Angstrom Engineering’s Reticle® techniques supply a transform-important solution for the people wanting to notice any optical design into a high-functionality film.
A shuttered QCM Situated close to the substrate provides feedback on the deposition amount and Bodily thickness with the increasing movie.
Each axis of movement is managed by way of Aeres® utilizing precision servo motors, delivering much better than 0.1 levels of positional accuracy. Front aspect infrared heating bulbs tilt Together with the phase to supply a reliable temperature profile for reactive processes.